Ultra High Precision UV Coaxial Imaging Scanning System at Micron Scale

　　Product features

　　Laser and illumination sources coaxial in front of  the galvanometer.

　　The working distance of the system is exactly the same as the working distance of the field mirror.

　　The laser processing range is fully aligned with the field mirror.

　　Simple sizing and sealing design for optical  paths.

　　Eliminates the effect of galvanometer drift on processing accuracy Compatible with CCDs up to 1" pixel size and down to 2.4 μm (up to 20 million).

　　Repeat positioning accuracy is typically 2.5 times the system pixel size.

　　Application test  of some projects